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We have some sapphire wafers that are about .800" in dia. x .1" thick. We are drilling holes in these wafers from .066" dia. to .010" dia. The wafers are cracking so we need to anneal them. What is the process for annealing sapphire?

The material type of sapphire (very hard) has to work up (cutting, drilling, etc.) by low velosity of rotation. I don't think that your “cracking” is depend from annealing. But if you want to anneal the sapphire: vacuum, 1800 °C, 24h.

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We have some sapphire wafers that are about .800" in dia. x .1" thick. We are drilling holes in these wafers from .066" dia. to .010" dia. The wafers are cracking so we need to anneal them. What is the process for annealing sapphire?
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